Skip to main content
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
/content/aip/journal/apl/103/25/10.1063/1.4850735
1.
1. S. Tadigadapa and K. Mateti, Meas. Sci. Technol. 20(9 ), 092001092030 (2009).
http://dx.doi.org/10.1088/0957-0233/20/9/092001
2.
2. L. Vergara, J. Olivares, E. Iborra, M. Clement, A. Sanz-Hervas, and J. Sangrador, Thin Solid Films 515(4 ), 18141818 (2006).
http://dx.doi.org/10.1016/j.tsf.2006.07.002
3.
3. R. C. Turner, P. A. Fuierer, R. E. Newnham, and T. R. Shrout, Appl. Acoust. 41(4 ), 299324 (1994).
http://dx.doi.org/10.1016/0003-682X(94)90091-4
4.
4. C. Deger, E. Born, H. Angerer, O. Ambacher, M. Stutzmann, J. Hornsteiner, E. Riha, and G. Fischerauer, Appl. Phys. Lett. 72(19 ), 24002402 (1998).
http://dx.doi.org/10.1063/1.121368
5.
5. L. Zheng, S. Ramalingam, T. Shi, and R. L. Peterson, J. Vac. Sci. Technol. A 11(5 ), 24372446 (1993).
http://dx.doi.org/10.1116/1.578589
6.
6. L. Khine, L. Y. L. Wong, J. B. W. Soon, and J. M. Tsai, Adv. Mater. Res. 254, 7477 (2011).
http://dx.doi.org/10.4028/www.scientific.net/AMR.254.74
7.
7. J. C. Doll, B. C. Petzold, B. Ninan, R. Mullapudi, and B. L. Pruitt, J. Micromech. Microeng. 20(2 ), 025008025015 (2010).
http://dx.doi.org/10.1088/0960-1317/20/2/025008
8.
8. M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi, and N. Kawahara, Adv. Mater. 21(5 ), 593596 (2009).
http://dx.doi.org/10.1002/adma.200802611
9.
9. M. Akiyama, T. Tabaru, K. Nishikubo, A. Teshigahara, and K. Kano, J. Ceram. Soc. Jpn. 118(1384 ), 11661169 (2010).
http://dx.doi.org/10.2109/jcersj2.118.1166
10.
10. F. Tasnadi, B. Alling, C. Hoglund, G. Wingqvist, J. Birch, L. Hultman, and I. A. Abrikosov, Phys. Rev. Lett. 104(13 ), 137601 (2010).
http://dx.doi.org/10.1103/PhysRevLett.104.137601
11.
11. C. Hoglund, J. Birch, B. Alling, J. Bareno, Z. Czigany, P. O. A. Persson, G. Wingqvist, A. Zukauskaite, and L. Hultman, J. Appl. Phys. 107(12 ), 123515 (2010).
http://dx.doi.org/10.1063/1.3448235
12.
12. A. Zukauskaite, G. Wingqvist, J. Palisaitis, J. Jensen, P. O. A. Persson, R. Matloub, P. Muralt, Y. Kim, J. Birch, and L. Hultman, J. Appl. Phys. 111(9 ), 093527 (2012).
http://dx.doi.org/10.1063/1.4714220
13.
13. A. Sanz-Hervas, E. Iborra, M. Clement, J. Sangrador, and M. Aguilar, Diamond Relat. Mater. 12(3–7 ), 11861189 (2003).
http://dx.doi.org/10.1016/S0925-9635(02)00228-5
14.
14. E. Iborra, M. Clement, L. Vergara, A. Sanz-Hervas, J. Olivares, and J. Sangrador, Appl. Phys. Lett. 88(23 ), 231901 (2006).
http://dx.doi.org/10.1063/1.2209205
15.
15. M. Clement, E. Iborra, J. Olivares, S. Gonzalez-Castilla, A. Sanz-Hervas, L. Vergara, and J. Sangrador, Ultrasonics 1–5, 22972300 (2006).
16.
16. T. Prokofyeva, M. Seon, J. Vanbuskirk, M. Holtz, S. A. Nikishin, N. N. Faleev, H. Temkin, and S. Zollner, Phys. Rev. B 63(12 ), 125313 (2001).
http://dx.doi.org/10.1103/PhysRevB.63.125313
17.
17. A. T. Collins, E. C. Lightowl, and P. J. Dean, Phys. Rev. 158(3 ), 833838 (1967).
http://dx.doi.org/10.1103/PhysRev.158.833
18.
18. M. Schneider, A. Bittner, F. Patocka, M. Stoger-Pollach, E. Halwax, and U. Schmid, Appl. Phys. Lett. 101(22 ), 221602 (2012).
http://dx.doi.org/10.1063/1.4768951
19.
19. A. R. Goni, H. Siegle, K. Syassen, C. Thomsen, and J. M. Wagner, Phys. Rev. B 64(3 ), 035205 (2001).
http://dx.doi.org/10.1103/PhysRevB.64.035205
20.
20. M. Ghosh, N. Dilawar, A. K. Bandyopadhyay, and A. K. Raychaudhuri, J. Appl. Phys. 106(8 ), 084306 (1–6) (2009).
http://dx.doi.org/10.1063/1.3243341
21.
21. R. A. Elmallawany, Infrared Phys. 29(2–4 ), 781785 (1989).
http://dx.doi.org/10.1016/0020-0891(89)90125-5
22.
22. G. Kresse and J. Furthmuller, Phys. Rev. B 54(16 ), 1116911186 (1996).
http://dx.doi.org/10.1103/PhysRevB.54.11169
23.
23. G. Kresse and D. Joubert, Phys. Rev. B 59(3 ), 17581775 (1999).
http://dx.doi.org/10.1103/PhysRevB.59.1758
24.
24.ICDD, Powder Diffraction File Inorganic and Organic Data Book, PDF-025-1133 (Newtown Square, PA USA, 2010).
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/25/10.1063/1.4850735
Loading
/content/aip/journal/apl/103/25/10.1063/1.4850735
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/apl/103/25/10.1063/1.4850735
2013-12-16
2016-09-28

Abstract

Doping of wurtzite aluminium nitride (AlN) with scandium (Sc) significantly enhances the piezoelectric properties of AlN. ScAlN thin films with different Sc concentrations (x = 0 to 0.15) were deposited by DC reactive magnetron sputtering. Infrared (IR) absorbance spectroscopy was applied to investigate the Sc concentration dependent shift of the IR active modes E(TO) and A(TO). These results are compared to simulations, being in excellent agreement with the experimental findings. In addition, IR spectroscopy is established as an economical and fast method to distinguish between thin films with a high degree of c-axis orientation and those exhibiting mixed orientations.

Loading

Full text loading...

/deliver/fulltext/aip/journal/apl/103/25/1.4850735.html;jsessionid=qO6pGdzw75tgen1NxLorEiW6.x-aip-live-06?itemId=/content/aip/journal/apl/103/25/10.1063/1.4850735&mimeType=html&fmt=ahah&containerItemId=content/aip/journal/apl
true
true

Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=apl.aip.org/103/25/10.1063/1.4850735&pageURL=http://scitation.aip.org/content/aip/journal/apl/103/25/10.1063/1.4850735'
x100,x101,x102,x103,
Position1,Position2,Position3,
Right1,Right2,Right3,