Full text loading...
III-V/Si hybrid DFB laser design: schematic drawing of a III-V/Si DFB laser resonator with vertical sidewall modulated Bragg gratings—cross-section (a) and top view (c); (b) finite element simulation (COMSOL) of a fundamental TE-like mode for a 500 nm wide and 550 nm tall III-V/Si waveguide with 250 nm silicon layer, 300 nm InGaAsP MQW layer, and 50 nm Al2O3 cladding.
(a), (b) Schematic steps of fabrication process; (c), (d) the SEM images of the Bragg grating after two-step RIE and after Al2O3 layer deposition by ALD, respectively.
Spectral evolution, with final peak wavelength at 1515 nm.
The laser light-light curve in linear and logarithmic (lower right inset) scale with the IR image (upper left inset) of the lasing mode; lasing threshold is at 530 W/mm2.
Multiple quantum well InGaAsP/InP epitaxial structure.
Article metrics loading...