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Wafer bonded distributed feedback laser with sidewall modulated Bragg gratings
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10.1063/1.4816331
/content/aip/journal/apl/103/4/10.1063/1.4816331
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/4/10.1063/1.4816331

Figures

Image of FIG. 1.
FIG. 1.

III-V/Si hybrid DFB laser design: schematic drawing of a III-V/Si DFB laser resonator with vertical sidewall modulated Bragg gratings—cross-section (a) and top view (c); (b) finite element simulation () of a fundamental TE-like mode for a 500 nm wide and 550 nm tall III-V/Si waveguide with 250 nm silicon layer, 300 nm InGaAsP MQW layer, and 50 nm AlO cladding.

Image of FIG. 2.
FIG. 2.

(a), (b) Schematic steps of fabrication process; (c), (d) the SEM images of the Bragg grating after two-step RIE and after AlO layer deposition by ALD, respectively.

Image of FIG. 3.
FIG. 3.

Spectral evolution, with final peak wavelength at 1515 nm.

Image of FIG. 4.
FIG. 4.

The laser light-light curve in linear and logarithmic (lower right inset) scale with the IR image (upper left inset) of the lasing mode; lasing threshold is at 530 W/mm.

Tables

Generic image for table
Table I.

Multiple quantum well InGaAsP/InP epitaxial structure.

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/content/aip/journal/apl/103/4/10.1063/1.4816331
2013-07-23
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Wafer bonded distributed feedback laser with sidewall modulated Bragg gratings
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/4/10.1063/1.4816331
10.1063/1.4816331
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