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Nanoplasmonic distributed Bragg reflector resonators for monolithic integration on a complementary metal-oxide-semiconductor platform
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10.1063/1.4817547
/content/aip/journal/apl/103/5/10.1063/1.4817547
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/5/10.1063/1.4817547

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic representation of the Au/SiO/Si MIS waveguide and (b) normalized electric field intensity distribution of the fundamental TM mode with a predicted propagation length of 21.9 m at 1.55 m.

Image of FIG. 2.
FIG. 2.

Scanning electron microscope images of fabricated 200 nm wide linear Au/SiO/Si MIS waveguides after (a) liftoff to define the plasmonic features and (b) etching to define the underlying photonic elements. (c) Power transmitted through waveguides with lengths up to 20 m at λ = 1.55 m. (d) Broadband propagation loss.

Image of FIG. 3.
FIG. 3.

(a) Schematic representation of the Au/SiO/Si MIS Bragg reflector. (b) Top-down schematic of the distributed Bragg reflector resonator depicting taper dimensions ( , , , , , and ), mirror dimensions ( and ), and central cavity (). (c) Scanning electron microscope image of a representative device, device 2, after liftoff. Normalized electric field intensity distributions of device 2 at the Au/SiO interface (d) “off” (λ = 1.51 m) and (e) “on” (λ = 1.53 m) resonance (dimensions not shown to scale to improve visibility).

Image of FIG. 4.
FIG. 4.

Experimental broadband transmission (blue solid line) for several devices with 5 nanosegment mirrors and 3 nanosegment tapers as compared to experimentally normalized FDTD simulations (red dashed line) for (a) device 1 with cavity length  = 510 nm and nanosegment length  = 210 nm separated by  = 150 nm, (b) device 2 with cavity length  = 510 nm and nanosegment length  = 250 nm separated by  = 100 nm, (c) device 3 with cavity length  = 675 nm and nanosegment length  = 250 nm separated by  = 100 nm, and (d) device 4 with cavity length  = 510 nm and nanosegment length  = 300 nm separated by  = 45 nm. The central peaks of the FDTD simulations of devices 1, 2, and 4 are fitted with a Lorentzian (green dotted line) in order to accurately calculate the Q factor.

Tables

Generic image for table
Table I.

Distributed Bragg reflector resonator cavity, mirror and taper dimensions.

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/content/aip/journal/apl/103/5/10.1063/1.4817547
2013-07-31
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanoplasmonic distributed Bragg reflector resonators for monolithic integration on a complementary metal-oxide-semiconductor platform
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/5/10.1063/1.4817547
10.1063/1.4817547
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