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Evaluation of the surface bonding energy of an InP membrane bonded oxide-free to Si using instrumented nanoindentation
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10.1063/1.4817675
/content/aip/journal/apl/103/8/10.1063/1.4817675
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/8/10.1063/1.4817675

Figures

Image of FIG. 1.
FIG. 1.

Atomic-resolution HAADF (left) and BF (right) STEM images of the oxide-free bonding interface between InP and Si in the reference specimen.

Image of FIG. 2.
FIG. 2.

Low-magnification BF-STEM image of the specimen indented with a maximum load of 10 mN. The impression made by the indenter is outlined on the image. Debonding can be observed far from the indented region. Inset shows an enlarged section of the image centered on the blister on the left-hand side of the indented region.

Image of FIG. 3.
FIG. 3.

Atomic-resolution BF-STEM image of the interface between InP and Si below the apex of the indenter. The outlined (1 1 1) and planes of InP and Si reveal that the InP membrane macroscopically rotates during the indentation experiment. Insets show the Fourier transforms of the InP and Si layers.

Image of FIG. 4.
FIG. 4.

Mapping of the rotation observed in Figure 3 , obtained using the GPA algorithm.

Image of FIG. 5.
FIG. 5.

Profile along the white arrow in Figure 4 . The average rotation is 16°.

Image of FIG. 6.
FIG. 6.

Schematic illustration of the mechanism responsible for the debonding.

Tables

Generic image for table
Table I.

Summary of findings.

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/content/aip/journal/apl/103/8/10.1063/1.4817675
2013-08-19
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evaluation of the surface bonding energy of an InP membrane bonded oxide-free to Si using instrumented nanoindentation
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/8/10.1063/1.4817675
10.1063/1.4817675
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