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Plasma diagnostic method using intermodulation frequencies in a Langmuir probe
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10.1063/1.4818822
/content/aip/journal/apl/103/8/10.1063/1.4818822
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/8/10.1063/1.4818822
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) A schematic diagram of the experimental setup, effect of the stray current on the harmonic method: (b) frequency effect and (c) cable length effect.

Image of FIG. 2.
FIG. 2.

Measured intermodulation currents and plasma parameters by increase of the stray current.

Image of FIG. 3.
FIG. 3.

(a) and (b) A schematic of the experimental setup and the floating probe system, (c) result of the FFT in the absence and presence of the plasma.

Image of FIG. 4.
FIG. 4.

Comparison of the plasma parameters: (a) plasma density with an increase of the incident power, (b) electron temperature with an increase of the gas pressure, (c) and (d) EEPF from the Langmuir probe with increase of the incident power and gas pressure.

Image of FIG. 5.
FIG. 5.

Measurement of plasma parameters in the CCP: (a) plasma density with increase of the bias power and (b) electron temperature with increase of the gas pressure.

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/content/aip/journal/apl/103/8/10.1063/1.4818822
2013-08-23
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Plasma diagnostic method using intermodulation frequencies in a Langmuir probe
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/8/10.1063/1.4818822
10.1063/1.4818822
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