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(a) A schematic diagram of the experimental setup, effect of the stray current on the harmonic method: (b) frequency effect and (c) cable length effect.
Measured intermodulation currents and plasma parameters by increase of the stray current.
(a) and (b) A schematic of the experimental setup and the floating probe system, (c) result of the FFT in the absence and presence of the plasma.
Comparison of the plasma parameters: (a) plasma density with an increase of the incident power, (b) electron temperature with an increase of the gas pressure, (c) and (d) EEPF from the Langmuir probe with increase of the incident power and gas pressure.
Measurement of plasma parameters in the CCP: (a) plasma density with increase of the bias power and (b) electron temperature with increase of the gas pressure.
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