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Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes
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10.1063/1.4819851
/content/aip/journal/apl/103/9/10.1063/1.4819851
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/9/10.1063/1.4819851
/content/aip/journal/apl/103/9/10.1063/1.4819851
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/content/aip/journal/apl/103/9/10.1063/1.4819851
2013-08-27
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/9/10.1063/1.4819851
10.1063/1.4819851
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