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1.
1. R. Ruby, Proc. IEEE Ultrason. Symp. 1030 (2007).
http://dx.doi.org/10.1109/ULTSYM.2007.262
2.
2. Y. Fujii, S. Yoshida, S. Misawa, S. Maekawa, and T. Sakudo, Appl. Phys. Lett. 31, 815 (1977).
http://dx.doi.org/10.1063/1.89550
3.
3. D. N. Nikogosyan, Properties of Optical and Laser-Related Materials: A Handbook (John Wiley & Sons, Chichester, 1997).
4.
4. M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi, and N. Kawahara, Adv. Mater. 21, 593 (2008).
http://dx.doi.org/10.1002/adma.200802611
5.
5. G. Wingqvist, F. Tasnádi, A. Zukauskaite, J. Birch, H. Arwin, and L. Hultman, Appl. Phys. Lett. 97, 112902 (2010).
http://dx.doi.org/10.1063/1.3489939
6.
6. R. Matloub, A. Artieda, C. Sandu, E. Milyutin, and P. Muralt, Appl. Phys. Lett. 99, 092903 (2011).
http://dx.doi.org/10.1063/1.3629773
7.
7. R. Matloub, M. Hadad, A. Mazzalai, N. Chidambaram, G. Moulard, C. S. Sandu, T. Metzger, and P. Muralt, Appl. Phys. Lett. 102, 152903 (2013).
http://dx.doi.org/10.1063/1.4800231
8.
8. A. Konno, M. Sumisaka, A. Teshigahara, K. Kano, K.-Y. Hashimo, H. Hirano, M. Esashi, M. Kadota, and S. Tanaka, Proc. IEEE Ultrason. Symp. 1378 (2013).
http://dx.doi.org/10.1109/ULTSYM.2013.0350
9.
9. K. Nakamura, H. Ando, and H. Shimizu, Proc. IEEE Ultrason. Symp. 719 (1986).
http://dx.doi.org/10.1109/ULTSYM.1986.198828
10.
10. A. Chowdhury, H. M. Ng, M. Bhardwaj, and N. G. Weimann, Appl. Phys. Lett. 83, 1077 (2003).
http://dx.doi.org/10.1063/1.1599044
11.
11. J. S. Park, T. Minegishi, S. H. Lee, I. H. Im, S. H. Park, T. Hanada, T. Goto, M. W. Cho, T. Yao, S. K. Hong, and J. H. Chang, J. Vac. Sci. Technol. A 26(1), 90 (2008).
http://dx.doi.org/10.1116/1.2821741
12.
12. J. Park, Y. Yamazaki, M. Iwanaga, S. Ahn, H. Jeon, T. Fujiwara, and T. Yao, Opt. Express 18, 7851 (2010).
http://dx.doi.org/10.1364/OE.18.007851
13.
13. U. Neumann, R. Grunwald, U. Griebner, G. Steinmeyer, M. Schmidbauer, and W. Seeber, Appl. Phys. Lett. 87, 171108 (2005).
http://dx.doi.org/10.1063/1.2112199
14.
14. M. Stutzmann, O. Ambacher, M. Eickhoff, U. Karrer, A. L. Pimenta, R. Neuberger, J. Schalwig, R. Dimitrov, P. J. Schuck, and R. D. Grober, Phys. Status Solidi B 228, 505 (2001).
http://dx.doi.org/10.1002/1521-3951(200111)228:2<505::AID-PSSB505>3.0.CO;2-U
15.
15. J. D. Larson Ш, S. Mishin, and S. Bader, Proc. IEEE Ultrason. Symp. 1054 (2010).
http://dx.doi.org/10.1109/ULTSYM.2010.5935971
16.
16. E. Milyutin, S. Harada, D. Martin, J. F. Carlin, N. Grandjean, V. Savu, O. Vaszquez-Mena, J. Brugger, and P. Muralt, J. Vac. Sci. Technol. B 28, L61 (2010).
http://dx.doi.org/10.1116/1.3501117
17.
17. M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, and N. Kawahara, Appl. Phys. Lett. 93, 021903 (2008).
http://dx.doi.org/10.1063/1.2957654
18.
18. M. Akiyama, T. Kamohara, N. Ueno, and M. Sakamoto, Appl. Phys. Lett. 90, 151910 (2007).
http://dx.doi.org/10.1063/1.2721865
19.
19. R. D. Felice and J. E. Northrup, Appl. Phys. Lett. 73, 936 (1998).
http://dx.doi.org/10.1063/1.122044
20.
20. T. Yanagitani and M. Kiuchi, J. Appl. Phys. 102, 044115 (2007).
http://dx.doi.org/10.1063/1.2772589
21.
21. S. Takayanagi, T. Yanagitani, and M. Matsukawa, Appl. Phys. Lett. 101, 232902 (2012).
http://dx.doi.org/10.1063/1.4769224
22.
22. J. F. Rosenbaum, Bulk Acoustic Wave Theory and Devices (Artech House, Boston, 1988).
23.
23. S. Kazuta, Y. Cho, H. Odagawa, and M. Kadota, Jpn. J. Appl. Phys., Part 1 39, 3121 (2000).
http://dx.doi.org/10.1143/JJAP.39.3121
24.
24. Y. Ohashi, M. Arakawa, J. Kushibiki, B. M. Epelbaum, and A. Winnacker, Appl. Phys. Express 1, 077004 (2008).
http://dx.doi.org/10.1143/APEX.1.077004
25.
25. S. Saitoh, M. Izumi, and Y. Mine, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 42, 294 (1995).
http://dx.doi.org/10.1109/58.365242
26.
26. T. Yanagitani, N. Morisato, S. Takayanagi, M. Matsukawa, and Y. Watanabe, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 58, 1062 (2011).
http://dx.doi.org/10.1109/TUFFC.2011.1906
27.
27. T. Yanagitani and M. Suzuki, Appl. Phys. Lett. 104, 082911 (2014).
http://dx.doi.org/10.1063/1.4866969
28.
28. G. F. Iriate, J. Bjurstrom, J. Westlinder, F. Engelmark, and I. Katardjiev, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52, 1170 (2005).
http://dx.doi.org/10.1109/TUFFC.2005.1504003
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/content/aip/journal/apl/104/17/10.1063/1.4874840
2014-05-02
2016-12-08

Abstract

Polarity inversion in wurtzite film is generally achieved by the epitaxial growth on a specific under-layer. We demonstrate polarity inversion of c-axis oriented ScAlN films by substrate ion beam irradiation without using buffer layer. Substrate ion beam irradiation was induced by either sputtering a small amount of oxide (as a negative ion source) onto the cathode or by applying a RF bias to the substrate. Polarity of the films was determined by a press test and nonlinear dielectric measurement. Second overtone thickness extensional mode acoustic resonance and suppression of fundamental mode resonance, indicating complete polarity inversion, were clearly observed in bilayer highly oriented (000-1)/(0001) ScAlN film.

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