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Design of sub-1g microelectromechanical systems accelerometersa)
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This paper presents a design of microelectromechanical systems(MEMS) accelerometers for sensing sub-1g (g = 9.8 m/s2) acceleration. The accelerometer has a high-density proof mass to suppress the Brownian noise that dominates the output noise of the sensor. The low-temperature (<400 °C) process enables to integrate the accelerometer on the sensing complementary metal-oxide semiconductor circuit by electroplating of gold; a proof mass of 1020 μm × 1020 μm in area with the thickness of 12 μm has been found to suppress the measured noise floor to 0.78 at 300 K, which is nearly one order of magnitude smaller than those of the conventional MEMS accelerometers made of silicon.
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