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/content/aip/journal/apl/108/16/10.1063/1.4947064
2016-04-18
2016-12-10

Abstract

We investigate the non-linear mechanical dynamics of a nano-optomechanical mirror formed by a suspended membrane pierced by a photonic crystal. By applying to the mirror a periodic electrostatic force induced by interdigitated electrodes integrated below the membrane, we evidence superharmonic resonances of our nano-electro-mechanical system; the constant phase shift of the oscillator across the resonance tongues is observed on the onset of principal harmonic and subharmonic excitation regimes.

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