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Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
Y. Pan, M. Yang, Y. Li, Z. Wang, C. Zhang, Y. Zhao, J. Yao, Q. Wu, and J. Xu, Sci. Rep. 6, 19571 (2016).
S. Adachi, Properties of Group-IV, III-V and II-VI Semiconductors ( John Wiley & Sons, Ltd., Chichester, 2005).
J. P. Glansdorff and I. Prigogine, Thermodynamical Theory of Structure, Stability and Fluctuations ( Wiley, New York, 1971).
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Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon
surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femtosecond laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation.
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