No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Tunable mechanical coupling between driven microelectromechanical resonators
G. Rebeiz, RF MEMS: Theory, Design, and Technology ( John Wiley & Sons, 2004).
C. Nguyen, V. Gutnik, and R. Howe, U.S. patent 5,839,062 (17 November 1998).
S. Y. No, A. Hashimura, S. Pourkamali, and F. Ayazi, in Proceedings of the Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head ( Citeseer, 2002), pp. 281–284.
L. Lin, C. Nguyen, R. Howe, and A. Pisano, “ Micro electromechanical filters for signal processing,” in 5th IEEE Micro Electro Mechanical Systems Workshop (MEMS 92), Travemuende, Germany, 4–7 February 1992 (IEEE, 1992), pp. 226–231.
E. J. Garcia and J. J. Sniegowski, in Proceedings of the 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX, Transducers' 95 (IEEE, 1995), Vol. 1, pp. 365–368.
P. R. Patterson, D. Hah, H. Nguyen, H. Toshiyoshi, R.-M. Chao, and M. C. Wu, in Proceedings of the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2002), pp. 544–547.
V. Sazonova, Ph.D. thesis, Cornell University, 2006.
R. Lifshitz and M. Cross, Nonlinear Dynamics of Nanosystems ( Wiley-VCH Verlag GmbH & Co. KGaA, 2010), pp. 221–266.
Article metrics loading...
We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.
Full text loading...
Most read this month