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RANGE AND DISTRIBUTION OF IMPLANTED BORON IN SILICON
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10.1063/1.1652592
/content/aip/journal/apl/13/7/10.1063/1.1652592
http://aip.metastore.ingenta.com/content/aip/journal/apl/13/7/10.1063/1.1652592
/content/aip/journal/apl/13/7/10.1063/1.1652592
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/content/aip/journal/apl/13/7/10.1063/1.1652592
2003-10-17
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: RANGE AND DISTRIBUTION OF IMPLANTED BORON IN SILICON
http://aip.metastore.ingenta.com/content/aip/journal/apl/13/7/10.1063/1.1652592
10.1063/1.1652592
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