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MOLYBDENUM FILMS AS PARTIAL DIFFUSION MASKS IN MOS PROCESSING
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10.1063/1.1653391
/content/aip/journal/apl/17/6/10.1063/1.1653391
http://aip.metastore.ingenta.com/content/aip/journal/apl/17/6/10.1063/1.1653391
/content/aip/journal/apl/17/6/10.1063/1.1653391
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/content/aip/journal/apl/17/6/10.1063/1.1653391
2003-10-21
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: MOLYBDENUM FILMS AS PARTIAL DIFFUSION MASKS IN MOS PROCESSING
http://aip.metastore.ingenta.com/content/aip/journal/apl/17/6/10.1063/1.1653391
10.1063/1.1653391
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