Superior Aluminum for Interconnections of Integrated Circuits
1.I. A. Blech and E. S. Meieran, Appl. Phys. Letters 11, 263 (1967).
2.R. Rosenberg and L. Berenbaum, Appl. Phys. Letters 12, 201 (1968).
3.R. E. Hummel and W. A. Slippy, Jr., Dept. of Metallurgical & Materials Eng., University of Florida, Gainesville, Fla.
4.J. W. Christian and P. R. Swann, AIME Metallurgical Society Conference (Gordon and Breach, New York, 1963), Vol. 29.
5.C. R. Barrett and O. D. Sherby, Trans. AIME 233, 1116 (1965).
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