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Comparative Study of Plasma Anodization of Silicon in a Column of a dc Glow Discharge
1.J. L. Miles and Smith, J. Electrochem. Soc. 110, 1240 (1963).
2.D. L. Pulfrey et al., Electrochemical Society Meeting, New York, 1969 (unpublished).
3.N. Ramasubrahmanian, Electrochem. Soc. 117, 947 (1970).
4.J. F. O’Hanlon, Technical Report No. RC 2889, IBM Research Center, Yorktown Heights, N.Y., 1970 (unpublished).
5.J. F. O’Hanlon (private communication), seminar given on “Plasma Anodization” at RCA Research Laboratories, Montreal, 1970 (unpublished).
6.Handbuch Der Physik, edited by S. Flügge (Springer‐Verlag, Berlin, 1956), Vol. 22, pp. 62–65.
7.These measurements were done by S. N. Ray, Bell Northern Research Labs., Ottawa, Canada.
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