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Estimation of impurity profiles in ion‐implanted amorphous targets using joined half‐Gaussian distributions
1.B. L. Crowder, J. Electrochem. Soc. 18, 943 (1971).
2.N. L. Johnson and S. Kotz, Continuous Unvariate Distributions, Vol. II (Houghton Mifflin, New York, 1970).
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