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Circular etch pits in ion‐implanted amorphous silicon films
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10.1063/1.1654636
/content/aip/journal/apl/22/6/10.1063/1.1654636
http://aip.metastore.ingenta.com/content/aip/journal/apl/22/6/10.1063/1.1654636
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/content/aip/journal/apl/22/6/10.1063/1.1654636
2003-10-16
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Circular etch pits in ion‐implanted amorphous silicon films
http://aip.metastore.ingenta.com/content/aip/journal/apl/22/6/10.1063/1.1654636
10.1063/1.1654636
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