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Simultaneous exposure and development technique for making gratings on positive photoresist
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10.1063/1.1655151
/content/aip/journal/apl/24/4/10.1063/1.1655151
http://aip.metastore.ingenta.com/content/aip/journal/apl/24/4/10.1063/1.1655151
/content/aip/journal/apl/24/4/10.1063/1.1655151
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/content/aip/journal/apl/24/4/10.1063/1.1655151
2003-10-09
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Simultaneous exposure and development technique for making gratings on positive photoresist
http://aip.metastore.ingenta.com/content/aip/journal/apl/24/4/10.1063/1.1655151
10.1063/1.1655151
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