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Ion implantation in silicon films on sapphire
1.R. G. Wilson and G. R. Brewer, Ion Beams with Applications to Ion Implantation (Wiley, New York, 1973).
2.J. Stephen, Rad. Electron. Eng. 42, No. 6 (1972).
3.J. W. Mayer, L. Eriksson, and J. A. Davies, Ion Implantation in Semiconductors (Academic, New York, 1970).
4.G. Dearnaley, J. H. Freeman, R. S. Nelson, and J. H. Stephen, Ion Implantation (North Holland , Amsterdam, 1973).
5.O. Almén, G. Bruce, and A. Lundén, Nucl. Instrum. 2, 249 (1958).
6.Å. Andersson and K‐H. Eklund, Göteborg Institute of Physics Report No. 79, 1971 (unpublished).
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