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Enhanced crystallinity of silicon film deposited at low temperature
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10.1063/1.88106
/content/aip/journal/apl/26/4/10.1063/1.88106
http://aip.metastore.ingenta.com/content/aip/journal/apl/26/4/10.1063/1.88106
/content/aip/journal/apl/26/4/10.1063/1.88106
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/content/aip/journal/apl/26/4/10.1063/1.88106
2008-09-02
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhanced crystallinity of silicon film deposited at low temperature
http://aip.metastore.ingenta.com/content/aip/journal/apl/26/4/10.1063/1.88106
10.1063/1.88106
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