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Single−crystal β−SiC films by reactive sputtering
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10.1063/1.88141
/content/aip/journal/apl/26/5/10.1063/1.88141
http://aip.metastore.ingenta.com/content/aip/journal/apl/26/5/10.1063/1.88141
/content/aip/journal/apl/26/5/10.1063/1.88141
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/content/aip/journal/apl/26/5/10.1063/1.88141
2008-09-02
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Single−crystal β−SiC films by reactive sputtering
http://aip.metastore.ingenta.com/content/aip/journal/apl/26/5/10.1063/1.88141
10.1063/1.88141
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