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Fabrication of submicron polysilicon lines by conventional techniques
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10.1063/1.88192
/content/aip/journal/apl/26/7/10.1063/1.88192
http://aip.metastore.ingenta.com/content/aip/journal/apl/26/7/10.1063/1.88192
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/content/aip/journal/apl/26/7/10.1063/1.88192
2008-09-02
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of submicron polysilicon lines by conventional techniques
http://aip.metastore.ingenta.com/content/aip/journal/apl/26/7/10.1063/1.88192
10.1063/1.88192
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