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Current‐pressure transitions in a magnetically supported dc sputtering system
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10.1063/1.88423
/content/aip/journal/apl/27/4/10.1063/1.88423
http://aip.metastore.ingenta.com/content/aip/journal/apl/27/4/10.1063/1.88423
/content/aip/journal/apl/27/4/10.1063/1.88423
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/content/aip/journal/apl/27/4/10.1063/1.88423
2008-09-02
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Current‐pressure transitions in a magnetically supported dc sputtering system
http://aip.metastore.ingenta.com/content/aip/journal/apl/27/4/10.1063/1.88423
10.1063/1.88423
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