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Profile and groove‐depth control in GaAs diffraction gratings fabricated by preferential chemical etching in H2SO4‐H2O2‐H2O system
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10.1063/1.88569
/content/aip/journal/apl/28/1/10.1063/1.88569
http://aip.metastore.ingenta.com/content/aip/journal/apl/28/1/10.1063/1.88569
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/content/aip/journal/apl/28/1/10.1063/1.88569
2008-08-28
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Profile and groove‐depth control in GaAs diffraction gratings fabricated by preferential chemical etching in H2SO4‐H2O2‐H2O system
http://aip.metastore.ingenta.com/content/aip/journal/apl/28/1/10.1063/1.88569
10.1063/1.88569
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