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Distribution across the channel of defects induced by nitrogen bombardment in silicon
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10.1063/1.88574
/content/aip/journal/apl/28/1/10.1063/1.88574
http://aip.metastore.ingenta.com/content/aip/journal/apl/28/1/10.1063/1.88574
/content/aip/journal/apl/28/1/10.1063/1.88574
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/content/aip/journal/apl/28/1/10.1063/1.88574
2008-08-28
2014-12-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Distribution across the channel of defects induced by nitrogen bombardment in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/28/1/10.1063/1.88574
10.1063/1.88574
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