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Orientation dependence of lattice strain in silicon epitaxial wafers
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10.1063/1.88879
/content/aip/journal/apl/29/1/10.1063/1.88879
http://aip.metastore.ingenta.com/content/aip/journal/apl/29/1/10.1063/1.88879
/content/aip/journal/apl/29/1/10.1063/1.88879
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/content/aip/journal/apl/29/1/10.1063/1.88879
2008-08-28
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Orientation dependence of lattice strain in silicon epitaxial wafers
http://aip.metastore.ingenta.com/content/aip/journal/apl/29/1/10.1063/1.88879
10.1063/1.88879
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