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19F range‐energy curve in Si from 100 to 550 keV
1.J. F. Gibbons, W. S. Johnson, and S. W. Mylroie, Projected Range Statistics Semiconductors and Related Materials, 2nd Ed. (Dowden, Hutchinson and Ross, Inc., Stroudsburg, Penn., 1975).
2.W. S. Johnson and J. F. Gibbons, Projected Range Statistics in Semiconductors (Stanford U.P., Stanford, 1969).
3.F. Eisen, Can. J. Phys. 46, 570 (1965).
4.W. Pietsch, U. Hauser, and W. Nuewirth, Nucl. Instrum. Methods 132, 79 (1976).
5.J. C. C. Tsai and J. M. Morabito, Ion Implantation in Semiconductors, edited by S. Namba (Plenum, New York, 1975), pp. 125–132.
6.J. F. Gibbons and S. Mylroie, Appl. Phys. Lett. 22, 568 (1973).
7.R. G. Wilson (private communication).
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