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A new inorganic electron resist of high contrast
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10.1063/1.89624
/content/aip/journal/apl/31/3/10.1063/1.89624
http://aip.metastore.ingenta.com/content/aip/journal/apl/31/3/10.1063/1.89624
/content/aip/journal/apl/31/3/10.1063/1.89624
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/content/aip/journal/apl/31/3/10.1063/1.89624
2008-08-26
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A new inorganic electron resist of high contrast
http://aip.metastore.ingenta.com/content/aip/journal/apl/31/3/10.1063/1.89624
10.1063/1.89624
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