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Interstitial oxygen gettering in Czochralski silicon wafers
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10.1063/1.89693
/content/aip/journal/apl/31/5/10.1063/1.89693
http://aip.metastore.ingenta.com/content/aip/journal/apl/31/5/10.1063/1.89693
/content/aip/journal/apl/31/5/10.1063/1.89693
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/content/aip/journal/apl/31/5/10.1063/1.89693
2008-08-26
2014-09-15
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interstitial oxygen gettering in Czochralski silicon wafers
http://aip.metastore.ingenta.com/content/aip/journal/apl/31/5/10.1063/1.89693
10.1063/1.89693
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