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Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
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10.1063/1.90109
/content/aip/journal/apl/32/8/10.1063/1.90109
http://aip.metastore.ingenta.com/content/aip/journal/apl/32/8/10.1063/1.90109
/content/aip/journal/apl/32/8/10.1063/1.90109
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/content/aip/journal/apl/32/8/10.1063/1.90109
2008-08-08
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
http://aip.metastore.ingenta.com/content/aip/journal/apl/32/8/10.1063/1.90109
10.1063/1.90109
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