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Solid‐phase epitaxy of implanted silicon by cw Ar ion laser irradiation
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10.1063/1.90430
/content/aip/journal/apl/33/6/10.1063/1.90430
http://aip.metastore.ingenta.com/content/aip/journal/apl/33/6/10.1063/1.90430
/content/aip/journal/apl/33/6/10.1063/1.90430
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/content/aip/journal/apl/33/6/10.1063/1.90430
2008-08-08
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Solid‐phase epitaxy of implanted silicon by cw Ar ion laser irradiation
http://aip.metastore.ingenta.com/content/aip/journal/apl/33/6/10.1063/1.90430
10.1063/1.90430
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