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Studies of the Si‐SiO2 interface by MeV ion channeling
1.For example, see Proceedings of International Conference of the Physics of and its Interfaces, edited by S. T. Pantelides (Pergamon, New York, 1978), p. 339 ff., and a recent spectroscopic ellipsometric analysis by D. E. Aspnes and J. B. Theeten, Phys. Rev. Lett. (to be published).
2.L. C. Feldman, I. Stensgaard, P. J. Silverman, and T. E. Jackman, part 1 of Ref. 1, p. 344.
3.L. C. Feldman, P. J. Silverman, J. S. Williams, T. E. Jackman, and I. Stensgaard, Phys. Rev. Lett. 41, 1396 (1978).
4.C. J. Schmidt, P. V. Lenzo, E. G. Spencer, J. Appl. Phys. 46, 4080 (1975).
5.I. Stensgaard, P. J. Silverman, and L. C. Feldman, Surf. Sci. 77, 513 (1978).
6.In these spectra the carbon signal (∼ channel 280) is probably enhanced since the scattering cross section appears to be non‐Rutherford.
7.S. T. Picraux, W. L. Brown, and W. M. Gibson, Phys. Rev. B 6, 1382 (1972).
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