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Segregation and increased dopant solubility in Pt‐implanted and laser‐annealed Si layers
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10.1063/1.91478
/content/aip/journal/apl/36/4/10.1063/1.91478
http://aip.metastore.ingenta.com/content/aip/journal/apl/36/4/10.1063/1.91478
/content/aip/journal/apl/36/4/10.1063/1.91478
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/content/aip/journal/apl/36/4/10.1063/1.91478
2008-07-23
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Segregation and increased dopant solubility in Pt‐implanted and laser‐annealed Si layers
http://aip.metastore.ingenta.com/content/aip/journal/apl/36/4/10.1063/1.91478
10.1063/1.91478
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