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Ionic species in a silane plasma
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10.1063/1.91907
/content/aip/journal/apl/37/3/10.1063/1.91907
http://aip.metastore.ingenta.com/content/aip/journal/apl/37/3/10.1063/1.91907
/content/aip/journal/apl/37/3/10.1063/1.91907
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/content/aip/journal/apl/37/3/10.1063/1.91907
2008-07-22
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ionic species in a silane plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/37/3/10.1063/1.91907
10.1063/1.91907
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