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Ionic species in a silane plasma
1.M. H. Brodsky, M. Cardona, and J. J. Cuomo, Phys. Rev. B 16, 3556 (1977).
2.J. Perrin, I. Solomon, B. Bourdon, J. Fontenille, and E. Ligeon, Thin Solid Films 62, 327 (1979).
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8.Y. Catherine, G. Turban, and B. Grolleau, (a) Thin Solid Films 60, 147 (1979);
8.(b) in the Proceedings of the Fourth International Symposium on Plasma Chemistry, Zurich, 1979 (unpublished), p. 164.
9.B. Drevillon, J. Hue, A. Lloret, J. Perrin, G. de Rosny, and J. P. M. Schmitt, in Ref. 8 (b), p. 169.
10.The degree of ionization in the sampled region of the plasma was estimated from the measured total ion current and from the calculated gas kinetic effusion rates of molecules into the acceptance angle of the mass spectrometer to be about at the lowest pressures and at the highest.
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13.Using the ion current integrated over all ions with j silicon atoms and correcting for the mass dependence of effusion increases the importance of the heavier ions but does not effect the qualitative conclusions.
14.M. H. Brodsky, M. A. Frisch, J. F. Ziegler, and W. A. Lanford, Appl. Phys. Lett. 30, 563 (1977).
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