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New high‐resolution charge transfer x‐ray and electron beam negative resist
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10.1063/1.91918
/content/aip/journal/apl/37/3/10.1063/1.91918
http://aip.metastore.ingenta.com/content/aip/journal/apl/37/3/10.1063/1.91918
/content/aip/journal/apl/37/3/10.1063/1.91918
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/content/aip/journal/apl/37/3/10.1063/1.91918
2008-07-22
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: New high‐resolution charge transfer x‐ray and electron beam negative resist
http://aip.metastore.ingenta.com/content/aip/journal/apl/37/3/10.1063/1.91918
10.1063/1.91918
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