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Silicon graphoepitaxy using a strip‐heater oven
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4.Graphoepitaxy is a new term coined to designate processes in which an artificial pattern on a surface is used to control orientation in a film.
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10.General Signal/Tempress, Sunnyvale, California. All gases used were pure to better than a few ppm.
11.See Ref. 1, 2, or 3 for definition of texture.
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