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High rate deposition of thick piezoelectric ZnO films using a new magnetron sputtering technique
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10.1063/1.92002
/content/aip/journal/apl/37/7/10.1063/1.92002
http://aip.metastore.ingenta.com/content/aip/journal/apl/37/7/10.1063/1.92002
/content/aip/journal/apl/37/7/10.1063/1.92002
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/content/aip/journal/apl/37/7/10.1063/1.92002
2008-07-23
2014-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High rate deposition of thick piezoelectric ZnO films using a new magnetron sputtering technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/37/7/10.1063/1.92002
10.1063/1.92002
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