Formation of silicon nitride structures by direct electron beam writing
1.For a general review of silicon nitride, see C.‐E. Morosanu, Thin Solid Films 65, 171 (1980).
2.T. Sakurai and H. D. Hagstrum, Phys. Rev. B 14, 1593 (1976).
3.Silicon surface structures have been reviewed by D. E. Eastman, J. Vac. Sci. Technol. 17, 492 (1980);
3.see also M. J. Cardillo and G. E. Becker, Phys. Rev. B 21, 1497 (1980).
4.R. Hezel and N. Lieske, J. Appl. Phys. 51, 2566 (1980).
5.J. F. Delord, A. G. Schrott, and S. C. Fain, Jr., J. Vac. Sci. Technol. 17, 517 (1980).
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