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Formation of silicon nitride structures by direct electron beam writing
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10.1063/1.92334
/content/aip/journal/apl/38/4/10.1063/1.92334
http://aip.metastore.ingenta.com/content/aip/journal/apl/38/4/10.1063/1.92334
/content/aip/journal/apl/38/4/10.1063/1.92334
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/content/aip/journal/apl/38/4/10.1063/1.92334
1981-02-15
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation of silicon nitride structures by direct electron beam writing
http://aip.metastore.ingenta.com/content/aip/journal/apl/38/4/10.1063/1.92334
10.1063/1.92334
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