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High concentration antimony diffusion into silicon using auxiliary wafers
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10.1063/1.92691
/content/aip/journal/apl/39/3/10.1063/1.92691
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/3/10.1063/1.92691
/content/aip/journal/apl/39/3/10.1063/1.92691
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/content/aip/journal/apl/39/3/10.1063/1.92691
1981-08-01
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High concentration antimony diffusion into silicon using auxiliary wafers
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/3/10.1063/1.92691
10.1063/1.92691
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