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Characterization of wet (D2O) thermal oxidation of silicon by secondary ion mass spectrometry
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10.1063/1.92817
/content/aip/journal/apl/39/8/10.1063/1.92817
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/8/10.1063/1.92817
/content/aip/journal/apl/39/8/10.1063/1.92817
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/content/aip/journal/apl/39/8/10.1063/1.92817
1981-10-15
2014-12-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of wet (D2O) thermal oxidation of silicon by secondary ion mass spectrometry
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/8/10.1063/1.92817
10.1063/1.92817
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