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The role of stabilized back‐surface damage in controlling internal SiO x nucleation and denudation zones in Si
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10.1063/1.92829
/content/aip/journal/apl/39/8/10.1063/1.92829
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/8/10.1063/1.92829
/content/aip/journal/apl/39/8/10.1063/1.92829
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/content/aip/journal/apl/39/8/10.1063/1.92829
1981-10-15
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The role of stabilized back‐surface damage in controlling internal SiOx nucleation and denudation zones in Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/8/10.1063/1.92829
10.1063/1.92829
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