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Dependence of implanted Se and S profiles on GaAs implantation temperature and crystallinity
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10.1063/1.92859
/content/aip/journal/apl/39/9/10.1063/1.92859
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/9/10.1063/1.92859
/content/aip/journal/apl/39/9/10.1063/1.92859
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/content/aip/journal/apl/39/9/10.1063/1.92859
1981-11-01
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dependence of implanted Se and S profiles on GaAs implantation temperature and crystallinity
http://aip.metastore.ingenta.com/content/aip/journal/apl/39/9/10.1063/1.92859
10.1063/1.92859
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