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Conductivity enhancement in laser‐recrystallized polycrystalline silicon‐on‐insulator using molecular hydrogen annealing
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10.1063/1.92922
/content/aip/journal/apl/40/1/10.1063/1.92922
http://aip.metastore.ingenta.com/content/aip/journal/apl/40/1/10.1063/1.92922
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/content/aip/journal/apl/40/1/10.1063/1.92922
1982-01-01
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Conductivity enhancement in laser‐recrystallized polycrystalline silicon‐on‐insulator using molecular hydrogen annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/40/1/10.1063/1.92922
10.1063/1.92922
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