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Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
1.Burn Jeng Lin, J. Vac. Sci. Technol. 12, 1317 (1975).
2.Donald C. Hofer, Frank B. Kaufman Steven, R. Kramer, and Ari Aviram, Appl. Phys. Lett. 37, 314 (1980).
3.Y. Aoyagi, K. Sano, and S. Namuba, Opt. Commun. 29, 253 (1979).
4.T. A. Wiggins and Alfred Salik, Appl. Phys. Lett. 25, 438 (1974).
5.G. C. Bjorklund, S. E. Harris, and J. F. Young, Appl. Phys. Lett. 25, 451 (1974).
6.C. G. Tison, A. K. Hays, and J. M. Hofftnan, Opt. Commun. 15, 188 (1975).
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