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Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
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/content/aip/journal/apl/40/5/10.1063/1.93108
1982-03-01
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
http://aip.metastore.ingenta.com/content/aip/journal/apl/40/5/10.1063/1.93108
10.1063/1.93108
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