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Planarization of patterned surfaces by ion beam erosion
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4.In Fig. 3, the thickness t of in the recess between the features is less than the depth d of the recess Hence, a planarized surface with recesses completely filled with is not possible with these samples.
5.S. Somekh and H. C. Casey, Jr., Appl. Opt. 16, 126 (1977).
6.L. D. Bollinger, Solid‐State Technol. 20, 66 (Nov. 1977).
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