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10‐nm linewidth electron beam lithography on GaAs
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10.1063/1.93757
/content/aip/journal/apl/42/1/10.1063/1.93757
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/1/10.1063/1.93757
/content/aip/journal/apl/42/1/10.1063/1.93757
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/content/aip/journal/apl/42/1/10.1063/1.93757
1983-01-01
2014-07-12
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: 10‐nm linewidth electron beam lithography on GaAs
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/1/10.1063/1.93757
10.1063/1.93757
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