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Low dose depth distribution of recoil implanted atoms
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10.1063/1.93759
/content/aip/journal/apl/42/1/10.1063/1.93759
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/1/10.1063/1.93759
/content/aip/journal/apl/42/1/10.1063/1.93759
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/content/aip/journal/apl/42/1/10.1063/1.93759
1983-01-01
2014-09-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low dose depth distribution of recoil implanted atoms
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/1/10.1063/1.93759
10.1063/1.93759
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