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New oxide growth law and the thermal oxidation of silicon
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10.1063/1.93797
/content/aip/journal/apl/42/10/10.1063/1.93797
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/10/10.1063/1.93797
/content/aip/journal/apl/42/10/10.1063/1.93797
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/content/aip/journal/apl/42/10/10.1063/1.93797
1983-05-15
2014-12-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: New oxide growth law and the thermal oxidation of silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/10/10.1063/1.93797
10.1063/1.93797
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