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Observation of oxidation‐enhanced and oxidation‐retarded diffusion of antimony in silicon
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10.1063/1.93966
/content/aip/journal/apl/42/5/10.1063/1.93966
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/5/10.1063/1.93966
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/content/aip/journal/apl/42/5/10.1063/1.93966
1983-03-01
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Observation of oxidation‐enhanced and oxidation‐retarded diffusion of antimony in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/5/10.1063/1.93966
10.1063/1.93966
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