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High resolution ion beam lithography at large gaps using stencil masks
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10.1063/1.93969
/content/aip/journal/apl/42/5/10.1063/1.93969
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/5/10.1063/1.93969
/content/aip/journal/apl/42/5/10.1063/1.93969
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/content/aip/journal/apl/42/5/10.1063/1.93969
1983-03-01
2015-04-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High resolution ion beam lithography at large gaps using stencil masks
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/5/10.1063/1.93969
10.1063/1.93969
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